Methods of fabricating nano-gap electrode structures in array
configurations, and the structures so produced. The fabrication method
involves depositing first and second pluralities of electrodes comprising
nanowires using processes such as lithography, deposition of metals,
lift-off processes, and chemical etching that can be performed using
conventional processing tools applicable to electronic materials
processing. The gap spacing in the nano-gap electrode array is defined by
the thickness of a sacrificial spacer layer that is deposited between the
first and second pluralities of electrodes. The sacrificial spacer layer
is removed by etching, thereby leaving a structure in which the distance
between pairs of electrodes is substantially equal to the thickness of
the sacrificial spacer layer. Electrode arrays with gaps measured in
units of nanometers are produced. In one embodiment, the first and second
pluralities of electrodes are aligned in mutually orthogonal
orientations.