A method and apparatus for measuring the physical properties of a micro
region measures the two-dimensional distribution of stress/strain in real
time at high resolution and sensitivity and with a high level of
measuring position matching. A sample is scanned and irradiated with a
finely focused electron beam (23, 26), and the displacement of position
of a diffraction spot (32, 33) is measured by a two-dimensional
position-sensitive electron detector (13). The displacement amount is
outputted as a voltage value that is then converted into the magnitude of
the stress/strain according to the principle of a nano diffraction
method, and the magnitude is displayed in synchronism with a sample
position signal.