A force scanning probe microscope (FSPM) and associated method of making
force measurements on a sample includes a piezoelectric scanner having a
surface that supports the sample so as to move the sample in three
orthogonal directions. The FSPM also includes a displacement sensor that
measures movement of the sample in a direction orthogonal to the surface
and generates a corresponding position signal so as to provide closed
loop position feedback. In addition, a probe is fixed relative to the
piezoelectric scanner, while a deflection detection apparatus is employed
to sense a deflection of the probe. The FSPM also includes a controller
that generates a scanner drive signal based on the position signal, and
is adapted to operate according to a user-defined input that can change a
force curve measurement parameter during data acquisition.