A high dielectric constant memory cell capacitor and method for producing
the same, wherein the memory cell capacitor utilizes relatively large
surface area conductive structures of thin spacer width pillars or having
edges without sharp corners that lead to electric field breakdown of the
high dielectric constant material. The combination of high dielectric
constant material in a memory cell along with a relatively large surface
area conductive structure is achieved through the use of a buffer
material as caps on the thin edge surfaces of the relatively large
surface area conductive structures to dampen or eliminate the intense
electric field which would be generated at the corners of the structures
during the operation of the memory cell capacitor had the caps not been
present.