Epoxy probe cards are modified by mounting passive and/or active
electronic components on the insulating surface of the probe card and
connecting those components to the probe wires with short, electrically
conductive lines that are formed on the probe card surface by printed
circuit techniques. Ordinary wire probes may be interspersed with coaxial
probes with electrically conducting tips bonded to electrically
insulating shanks. An auxiliary printed circuit board containing
additional electronic components may be included to accommodate
especially sensitive test points. The resulting probe structure is
intended to extend the frequency range of the well-developed epoxy probe
card technology while retaining its ruggedness and low cost features.