A structure and method for producing color filters with a protective
silation layer is described. In one embodiment, each filter is coated
with a silation layer to prevent bleeding of material between closely
spaced filters during the fabrication process. In a second embodiment,
the silation layer is used to protect an array of filters from physical
damage during detaping operations. In a third embodiment, the silation
layer is used before fabrication later filters in a color filter array to
prevent damage to previous filter layers.