An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma ("LPP") extreme ultraviolet ("EUV") light source comprising a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site.

 
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> Coaxial-flow heat exchanging structure for installation in the earth and introducing turbulence into the flow of the aqueoue-based heat transfer fluid flowing along the outer flow channel while its cross-sectional characteristics produce fluid flows therealong having optimal vortex characteristics that optimize heat transfer with the earth
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