Disclosed is a method of manufacturing a liquid jet head, which enables a
passage-forming substrate to be easily handled, thus realizing good
formation of pressure generating chambers and an improvement in
manufacturing efficiency. The method includes the steps of: forming a
vibration plate and piezoelectric elements on one surface of the
passage-forming substrate; thermally adhering a reinforcing substrate for
reinforcing the rigidity of the passage-forming substrate, onto the
passage-forming substrate; processing the passage-forming substrate to
have a predetermined thickness; depositing an insulation film on other
surface of the passage-forming substrate at lower temperature than that
for adhering the passage-forming substrate and the reinforcing substrate,
and patterning the insulation film into a predetermined shape; and
etching the passage-forming substrate using the patterned insulation film
as a mask to form the pressure generating chambers. Thus, handling of the
passage-forming substrate becomes easy, and the pressure generating
chambers can be formed with high precision.