A method of simultaneously fabricating at least two semiconductor devices,
at least bone of which is a nanocrystal memory and at least one of which
is a non-nanocrystal semiconductor device. A nanocrystal layer is formed
over an oxide layer of the at least two semiconductor devices being
fabricated. The nanocrystal layer is removed from at least one portion of
the substrate corresponding to the at least one non-nanocrystal device
being fabricated. A polycrystalline gate is formed for each of the
semiconductor devices being fabricated. Doping is provided to provide the
source and drain regions for each of the semiconductor devices being
fabricated. The substrate is thermally treated after the doping. The
thermal budget of the fabrication process is not limited by this thermal
treatment.