A method of manufacturing a micro flux gate sensor that has a good
electrical connection and can be easily manufactured includes operations
of forming a metal pattern, forming a first insulation layer to cover the
metal pattern and forming viaholes to expose a certain portion of the
metal pattern, applying an electrical signal through the metal pattern
and plating the viaholes with a metal material to form a connection
portion, forming a magnetic core on an upper portion of the first
insulation layer, forming a second insulation layer to cover the magnetic
core and forming an upper coil portion electrically connected to the
connection portion to form the excitation coil and the magnetic field
detecting coil, forming a third insulation layer to cover the upper coil
portion, and removing a certain portion of the metal pattern to leave
only the lower coil portion of the metal pattern.