High voltage silicon carbide (SiC) devices, for example, thyristors, are
provided. A first SiC layer having a first conductivity type is provided
on a first surface of a voltage blocking SiC substrate having a second
conductivity type. A first region of SiC is provided on the first SiC
layer and has the second conductivity type. A second region of SiC is
provided in the first SiC layer. The second region of SiC has the first
conductivity type and is adjacent to the first region of SiC. A second
SiC layer having the first conductivity type is provided on a second
surface, opposite the first surface, of the voltage blocking SiC
substrate. First, second and third contacts are provided on the first
region of SiC, the second region of SiC and the second SiC layer,
respectively. Related methods of fabricating high voltage SiC devices are
also provided.