A method for manufacturing a magnetic recording medium is provided, by
which a magnetic recording medium having a recording layer formed in a
concavo-convex pattern, a sufficiently flat surface, and high recording
and reproducing precision is efficiently manufactured. In a non-magnetic
material filling step, a non-magnetic material is deposited over a
recording layer formed in a predetermined concavo-convex pattern over a
substrate to fill concave portions of the concavo-convex pattern with the
non-magnetic material. In a flattening step, an excess part of the
non-magnetic material above the recording layer is removed by dry
etching, to flatten surfaces of the recording layer and the non-magnetic
material. Processing conditions are set so as to substantially equalize
an etching rate of the non-magnetic material with an etching rate of the
recording layer with respect to the dry etching in the flattening step.