A display device fabricating apparatus includes a radio frequency generator and a vacuum chamber. A first electrode and a second electrode that receive power from the radio frequency generator form a plasma using a gas inside the vacuum chamber. A power supply line supplies power to the first electrode from the radio frequency generator. A refrigerating part uses a refrigerant other than air in order to remove the heat generated from the power supply line. The refrigerant is circulated through a system that cools the refrigerant below the ambient external temperature before the refrigerant is used to cool the power supply line and re-cool or re-liquefy the refrigerant that has been heated by the power supply line.