A gas sprayer mounted on an edge removing robotic arm is disclosed,
wherein the edge removing robotic arm circles around along the edges of a
substrate and sprays a chemical solvent over the edge surface of the
substrate to dissolve photoresist materials attached to the edges of the
substrate; the edge removing robotic arm has a pumping conduit for
sucking out the chemical solvent sprayed over the surface of the
substrate and dissolved photoresist particles; the gas sprayer is mounted
on the top of the edge removing robotic arm and comprises a hooked nozzle
extending forward around the front end of the edge removing robotic arm
and facing an opening of the pumping conduit to spray gas out so as to
prevent the chemical solvent sprayed out from the edge removing robotic
arm from splashing onto the interior of the substrate.