An actuator system for making a nanoscale movement of an object is
provided. In the actuator system, a platform supports the object. A
Z-axis actuator connects the platform to the object in a Z-axis
direction, and moves the object in the Z-axis direction by Z-axis
direction transformation. A frame supports the platform around the
platform. An X-axis actuator connects the frame to the platform in an
X-axis or Y-axis direction perpendicular to the Z-axis, and moves the
object in the X-axis direction by transformation in the direction
perpendicular to the Z-axis.