A test vehicle comprises at least one product layer having a east one
product circuit pattern on the product layer, and one or more clone
layers formed over the product layer (1902). The one or more clone layers
include a plurality of structures, which may include clone test vehicle
circuit patterns and/or clone test vehicle vias (1902). The presence of
one or more defects (1904) in the one or more clone layers (1908) is an
indicator of a tendency of the product circuit pattern to impact yield of
a succeeding layer to be formed over the product circuit pattern in a
product (1910).