In the method and a device for detecting the phase of a moving object
using a heterodyne interferometer, a heterogeneous mode helium-neon laser
is used as a direct light source to increase a measuring speed, a
measuring resolution, and minimize the loss of the light source. Signals,
which have only a frequency difference between reference signals or
measured signals and arbitrary signals, are extracted from signals which
are obtained by multiplying the arbitrary frequency signals by the
reference or measured signals. After frequencies of the reference and
measured signals are converted, a phase difference of the extracted
signals and displacement of the moving object is measured. The system
includes a laser light source, an optical interferometer, a frequency
converter, and a phase measurer. The light source uses output light,
emitted from the laser generator, which is stabilized in frequency, and
has two frequencies which are at right angles to each other and linearly
polarized.