The present invention is a substrate treatment method in which a treatment
by supplying a treatment solution from a nozzle to a substrate is
successively performed for a plurality of substrates, which comprises the
step of, during the performance of the successive treatments, performing
between the treatments a plurality of pre-dispenses for different
purposes of the treatment solution, wherein at least a recipe of the
treatment solution to be pre-dispensed or a start condition of the
pre-dispense is determined for each of the pre-dispenses. According to
the present invention, the pre-dispense can be performed at a necessary
and sufficient frequency to shorten the suspension time due to the
pre-dispenses in the substrate treatment. This improves the throughput
and reduces the number of pre-dispenses, resulting in reduced consumption
of the treatment solution.