A coating apparatus 10 includes a base 11, a substrate support stage unit
2 mounted on the base 11 and capable of fixedly supporting a substrate 1,
a coating unit 3 mounted on the base 11 and capable of discharging a
coating material onto a substrate 1 fixedly supported on the substrate
support stage unit 2, and a motor unit 4 for driving at least either the
substrate support stage unit 2 or the coating unit 3 for sliding on the
base 11. The motor unit 3 has a stator assembly 22 on the base 11. The
stator assembly 22 includes a plurality of magnets 31 linearly arranged
such that opposite magnetic polarities of the magnets alternately change,
and a pair of magnet holding members 37 and 38 for linearly pressing the
magnets 31 together from both the ends of the magnets.