A method for manufacturing copper wires on a substrate for a flat panel
display device is disclosed. The method comprises following steps:
providing a substrate; forming a seed layer on the surface; forming a
patterned photoresist on the surface of the seed layer to expose a part
of the seed layer; and plating a copper layer on the exposed part of the
seed layer. As the copper layer is plated, an electrolyte solution
comprises a sulfur-containing compound is used. The angle between the
surface of the copper layer and the contact surface of the seed layer is
greater than 0 degree and less than 90 degree. Through the method
illustrated above, the film step-coverage in the following process can be
improved, the generated voids in device can be reduced, the manufacturing
steps can be simplified, and the complicated etching process can be
avoided.