A graphical profile map for integrated circuits on a substrate. The
graphical profile map includes a depiction of die placement boundaries
and shot placement boundaries for the integrated circuits on the
substrate. Also included are integrated circuit property information
contours, where the contours are not limited to either of the die
placement boundaries or the shot placement boundaries. In this manner,
three key pieces of information for the integrated circuits are
presented, including integrated circuit property information, die
placement, and shot placement. Because these three pieces of information
are presented in a graphical form, it is much easier to interpret the
information. For example, it is much easier to determine which shot and
die placements have properties that are at risk, and which shot and die
placements have adequate property profiles.