The nitride semiconductor laser device has a counter electrode structure
where contact resistance is reduced and manufacturing methods thereof are
provided. The nitride semiconductor laser device comprises a nitride
semiconductor substrate having a first main surface and a second main
surface. A nitride semiconductor layer is stacked on the first main
surface of the nitride semiconductor substrate. A ridge-shaped stripe is
formed in the nitride semiconductor layer, and a resonance surface forms
an optical waveguide in the direction perpendicular to the length of the
ridge-shaped stripe. A first region having a crystal growth facet in the
(0001) plane and a second region on the first main surface or the second
main surface are provided. Further, a recess is formed in the second
region of the first main surface and/or the second main surface. A
ridge-shape stripe is formed over the first main surface of the nitride
semiconductor substrate.