A metal wiring for a semiconductor device and a method for forming the
same are provided. The metal wiring includes a first insulating layer and
a second insulating layer; an interlayer insulating film formed between
the first and second insulating layers, wherein the interlayer insulating
film is provided with holes having a designated shape; a barrier metal
layer, a copper seed layer, and a copper layer sequentially formed in the
holes of the interlayer insulating film; and a capping layer formed
between the interlayer insulating film and the second insulating layer.
The capping layer formed between the interlayer insulating film and the
second insulating layer may be made of a negatively charged insulating
material, thereby improving electro-migration characteristics at an
interface between the capping layer and the copper layers.