A restrained surface wave resonator with reduced or abated acceleration
sensitivity is provided with a stiffening layer, adhesive layers and
subsurface horizontal indentations on the substrate to achieve reduced
acceleration sensitivity, increased structural rigidity, decreased
sensitivity to in-plane deformations, a lightweight device and reduced
deleterious effects from environmental shocks and vibration. The
substrate of the restrained surface wave resonators features multiple
subsurface horizontal indentations in one major substrate surface
deposited on a stiffening layer to provide improved structural rigidity
against flexure caused by normal acceleration based upon the diminished
mass and reduced weight resulting from removal of portions of the
substrate subsurface through micro-machining, and it also tends to
improve excessive sensitivity to other flexural deformations. The present
invention encompasses a restrained surface wave resonator device and a
restrained surface wave resonator system.