A method for determining spectral characteristics of an object is
disclosed. A probe is positioned in proximity relative to the object and
provides light to a surface of the object and receives light from the
object. One or more critical heights are defined below which no
specularly refelcted light is received and propagated. Prior to
positioning the probe in proximity relative to the object, a plurality of
position-sensitive calibration/normalization reference and a plurality of
calibration/normalization measurements are taken with the probe at a
plurality of predetermined positions with respect to the
calibration/normalization reference. The intensity of light received is
determined in a plurality of spectral bands with one or more
measurements. The spectral characteristics of the object are determined
based on the one or more measurements and based on data taken from one or
more of the calibration/normalization measurements.