The present invention provides a sulfonium salt of the formula (Ia)
##STR00001## a polymeric compound comprising a structural unit of the
formula (Ib) ##STR00002## and a chemical amplification type positive
resist composition comprising (A) an acid generator comprising at least
one compound selected from the group consisting of a sulfonium salt of
the formula (Ia), a polymeric compound comprising a structural unit of
the formula (Ib), and a sulfonium salt of the formula (Ic); and (B) resin
which contains a structural unit having an acid labile group and which
itself is insoluble or poorly soluble in an alkali aqueous solution but
becomes soluble in an alkali aqueous solution by the action of an acid.