A light-emitting diode is built on a silicon substrate doped with a p-type
impurity to possess sufficient conductivity to provide a current path.
The p-type silicon substrate has epitaxially grown thereon two superposed
buffer layers of aluminum nitride and n-type indium gallium nitride.
Further grown epitaxially on the buffer layers is the main semiconductor
region of the LED which comprises a lower confining layer of n-type
gallium nitride, an active layer for generating light, and an upper
confining layer of p-type gallium nitride. In the course of the growth of
the main semiconductor region there occurs a thermal diffusion of
aluminum, gallium and indium from the buffer layers into the p-type
silicon substrate, with the consequent creation of an alloy layer of the
diffused metals. Representing p-type impurities in the p-type silicon
substrate, these metals do not create a pn junction in the substrate
which causes a forward voltage drop.