Embodiments of the invention provide a laser processing apparatus and
method. The laser processing apparatus includes a holder that holds a
processing target, a first laser source that emits pulsed laser beam, and
a second laser source that emits continuous-wave laser beam. The
apparatus further includes an optical system that transmits the pulsed
laser beam from the first laser source and the continuous-wave laser beam
from the second laser source on a surface of the processing target held
by the holder in such a manner that a beam spot of the pulsed laser beam
is included inside a beam spot of the continuous-wave laser beam, and a
moving mechanism that moves the beam spots of the pulsed laser beam and
the continuous-wave laser beam on the surface of the processing target.