An apparatus (100) for measuring a thickness of a thin article according
to an embodiment of the present apparatus is provided. The apparatus
includes an optical fiber interferometer (101), a signal processor module
(102) and a measuring module (103). The optical fiber interferometer is
configured for obtaining an optical distance difference. This optical
distance difference is a result of the thickness of the thin article
between a first optical path in which the thin article is measured and a
second optical path. The signal processor module is configured for
converting an optical distance difference into a phase difference and
processing the optical distance difference to obtain a linear signal.
That linear signal is convertible into a thickness value of the thin
article.