The invention provides a coating solution for forming a porous film having
excellent mechanical strength and dielectric properties and for easily
forming a film with a freely controlled film thickness in an ordinarily
employed method in semiconductor process. More specifically, provided are
a method for preparing a porous-film-forming composition comprising steps
of preparing polysiloxane, silica or zeolite particles (Component A),
imparting crosslinkability to Component A, and temporarily terminating
the crosslinkability; and a porous-film-forming composition obtainable in
this method. In addition, provided is a method of forming a porous film
comprising steps of preparing a porous-film-forming composition by
preparing Component A, imparting crosslinkability to Component A and
adding a crosslinkability inhibitor to temporarily terminate the
crosslinkability; applying the porous-film-forming composition onto a
substrate to form a film, drying the film, crosslinking the particles
along with removing the crosslinkability inhibitor by heating the dried
film.