An embodiment of the instant invention is a method of providing a
connection between a first conductor and a second conductor wherein the
first conductor is situated under the second conductor and separated by a
first insulating layer, the method comprising the steps of: forming an
opening in the first insulating layer (layer 124 or 128 of FIGS. 1-4),
the opening having a top, a bottom and sidewalls and is situated between
the first conductor and the second conductor; forming a second insulating
layer (layer 134, 138, and 142 of FIGS. 3 and 4) exclusively on the
sidewalls of the opening thereby leaving a smaller opening in the first
insulating layer; forming a conductive material (material 140 of FIGS. 3
and 4) in the smaller opening; and wherein the first insulating layer is
comprised of a low-k material and the second insulating layer is
comprised of an insulator which has electrical leakage properties which
are less than the electrical leakage properties of the first insulating
layer.