A method for testing a component configured to be installed in a plasma
processing system. The method includes providing an ATAC (Automated Test
and Characterization) fixture, which includes a system control software
package ( SCS) that is representative of production system control
software, a data manager module configured to obtain specification data
from a database over a computer network, a test manager module configured
to execute a set of tests designed to test the component, a SCS interface
engine configured to provide the set of tests to the SCS, and a data
analysis module configured to provide computer-implemented data analysis
tool for analyzing test data obtained from the testing the component. The
method also includes coupling the ATAC fixture to the component to enable
the SCS in the ATAC fixture to test the component utilizing the set of
tests and at least a portion of the specification data.