To obtain a micromachine for use as a high frequency filter having a high
Q value and a higher frequency band.In a micromachine (20) including: an
input electrode (7b), an output electrode (7a), and a support electrode
(7c) disposed on a substrate (4); and a band-shaped vibrator electrode
(15) formed by laying a beam (vibrating part) (16) over the output
electrode (7a) with a space part (A) interposed between the output
electrode (7a) and the vibrator electrode (15) in a state in which both
end parts of the vibrator electrode (15) are supported on the input
electrode (7b) and the substrate (4) with the support electrode (7c)
interposed between the substrate (4) and the vibrator electrode (15), the
entire surface of both end parts of the vibrator electrode (15) from an
edge of the end parts to the beam (16) is completely fixed to the input
electrode (7b) and the support electrode (7c).