A semiconductor structure having improved carrier mobility is provided.
The semiconductor structures includes a hybrid oriented semiconductor
substrate having at least two planar surfaces of different
crystallographic orientation, and at least one CMOS device located on
each of the planar surfaces of different crystallographic orientation,
wherein each CMOS device has a stressed channel. The present invention
also provides methods of fabricating the same. In general terms, the
inventive method includes providing a hybrid oriented substrate having at
least two planar surfaces of different crystallographic orientation, and
forming at least one CMOS device on each of the planar surfaces of
different crystallographic orientation, wherein each CMOS device has a
stressed channel.