The present invention is an online methodology for end point detection for
use in a chemical mechanical planarization process which is both robust
and inexpensive while overcoming some of the drawbacks of the existing
end point detection approaches currently known in the art. The present
invention provides a system and method for identifying a significant
event in a chemical mechanical planarization process including the steps
of decomposing coefficient of friction data acquired from a chemical
mechanical planarization process using wavelet-based multiresolution
analysis, and applying a sequential probability ratio test for variance
on the decomposed data to identify a significant event in the chemical
mechanical planarization process.