A projection system, a spatial light modulator, and a method for forming a
micromirror array such as for a projection display are disclosed. The
spatial light modulator can have two substrates bonded together with one
of the substrates comprising a micro-mirror array. The two substrates can
be bonded at the wafer level after depositing a getter material and/or
solid or liquid lubricant on one or both of the wafers if desired. In one
embodiment of the invention, one of the substrates is a light
transmissive substrate and a light absorbing layer is provided on the
light transmissive substrate to selectively block light from passing
through the substrate. The light absorbing layer can form a pattern, such
as a frame around an array of micro-mirrors.