Highly ordered and aligned epitaxy of III-Nitride nanowires is
demonstrated in this work. <1010> M-axis is identified as a
preferential nanowire growth direction through a detailed study of
GaN/AlN trunk/branch nanostructures by transmission electron microscopy.
Crystallographic selectivity can be used to achieve spatial and
orientational control of nanowire growth. Vertically aligned (Al)GaN
nanowires are prepared on M-plane AlN substrates. Horizontally ordered
nanowires, extending from the M-plane sidewalls of GaN hexagonal mesas or
islands demonstrate new opportunities for self-aligned nanowire devices,
interconnects, and networks.