A method for classifying defects of an object includes irradiating lights
having different polarizations onto the object to create an inspection
spot on the object, collecting scattered lights generated by the
irradiated lights scattering from the inspection spot, and classifying
defects of the object by type of defect by analyzing the scattered
lights. An apparatus for classifying defects of an object includes light
creating means emitting lights having different polarizations to create
an inspection spot on the object, and a detecting member for collecting
scattered lights that are created from the lights scattering from the
inspection spot, wherein the scattered lights are analyzed and classified
in accordance with defects positioned on the inspection spot of the
object.