A packaging chip in which a circuit module is packaged and a method of
packaging a circuit module are provided. The packaging chip includes a
base wafer; a circuit module on the base wafer; a packaging wafer having
a cavity and combined with the base wafer so that the circuit module fits
inside the cavity; a connecting electrode connecting upper and lower
surfaces of the cavity; and a seed layer between the connecting electrode
and the packaging wafer. The method includes etching a lower surface of
the packaging wafer to form a cavity, stacking a metal layer in an area
of the lower surface, combining the base wafer with the packaging wafer,
polishing the packaging wafer, forming a viahole through the packaging
wafer, stacking a seed layer on the packaging wafer, plating the inside
of the viahole, removing the seed layer and forming an electrode.