Disclosed is a system for moving substrates in and out of a manufacturing
process. The present invention comprises an automatic transfer device for
automatically transferring a cassette that stores substrates, a manual
transfer device for transferring the cassette according to instructions
of an operator, and a process apparatus for performing predetermined jobs
on the substrate stored in the cassette, wherein the process apparatus
comprises: a port on which the cassette is temporarily placed by the
automatic transfer device or the manual transfer device; a loader which
has a sensor to receive a communication start signal transferred from the
automatic transfer device when the cassette is transferred by the
automatic transfer device; and a job table on which actual jobs on the
substrates, stored in the cassette, are performed, and wherein when the
cassette is placed on the port, the process apparatus checks whether the
communication start signal is received by the sensor, and when the signal
is received, it is determined that the cassette has been transferred by
the automatic transfer device, such that the process apparatus is set in
an automatic transfer mode, and when the signal is not received, it is
determined that the cassette has been transferred by the manual transfer
device, and therefore, the process apparatus is set in a manual transfer
mode. The present invention improves productivity and efficiency.