A method of producing a liquid crystal display device. A first substrate
having a liquid crystal dripped thereon, and a second substrate, are
arranged in a vacuum chamber. The first substrate is held by a first
electrostatic chuck and the second substrate is held by a second
electrostatic chuck. The second substrate is urged onto the first
substrate to bond the first substrate and the second substrate together.
The bonded first and second substrates are then peeled off from the
electrostatic chucks. A resin sheet is arranged on the second
electrostatic chuck, so that the bonded first and second substrates do
not cling to the second electrostatic chuck when peeled off.