A structure for improving the electrostatic discharge robustness of an
integrated circuit having an electrostatic discharge (ESD) device and a
receiver network connected to a pad by interconnects. The interconnect
between the pad and the ESD device has a high-k material placed adjacent
to at least one surface of the interconnect and extending over the
thermal diffusion distance of the interconnect. The high-k material
improves the critical current density of the interconnect by increasing
the heat capacity and thermal conductivity of the interconnect. The
high-k material can be placed on the sides, top and/or bottom of the
interconnect. In multiple wire interconnects, the high-k material is
placed between the wires of the interconnect. A low-k material is placed
beyond the high-k material to reduce the capacitance of the interconnect.
The combination of low-k and high-k materials provides an interconnect
structure with improved ESD robustness and low capacitance that is well
suited for an ESD device. The interconnect to the receiver, which does
not carry a high current, is surrounded by a low-k material for reduced
capacitance and performance advantages.