The present invention discloses a CMP abrasive comprising cerium oxide
particles, a dispersant, an organic polymer having an atom or a structure
capable of forming a hydrogen bond with a hydroxyl group present on a
surface of a film to be polished and water, a method for polishing a
substrate comprising polishing a film to be polished by moving a
substrate on which the film to be polished is formed and a polishing
platen while pressing the substrate against the polishing platen and a
polishing cloth and supplying the CMP abrasive between the film to be
polished and the polishing cloth, a method for manufacturing a
semiconductor device comprising the steps of the above-mentioned
polishing method, and an additive for a CMP abrasive comprising an
organic polymer having an atom or a structure capable of forming a
hydrogen bond with a hydroxyl group present on a surface of a film to be
polished, and water.