A silicon production reactor including a reaction vessel and heating
element, the reaction vessel has a vertically extending wall and a space
surrounded by the wall, the heating element being capable of heating at
least a part, including lower end portion, of the wall's surface facing
the space to a temperature of not lower than the melting point of
silicon, the silicon production reactor being adapted to flow raw gas for
silicon deposition from an upper part of the space of the reaction vessel
toward a lower part thereof, characterized in that the space of the
reaction vessel is of slit form in cross-sectional view. This silicon
production reactor is capable of attaining improvement with respect to
problems encountered at apparatus scale-up, such as decrease of
reactivity of raw gas and generation of by-products, thereby
accomplishing a striking enhancement of production efficiency.