The polishing pad is suitable for planarizing at least one of
semiconductor, optical and magnetic substrates. The polishing pad
includes a cast polyurethane polymeric material formed with an
isocyanate-terminated reaction product formed from a prepolymer reaction
of a prepolymer polyol and a polyfunctional isocyanate. The
isocyanate-terminated section product has 4.5 to 8.7 weight percent
unreacted NCO; and the isocyanate-terminated reaction product is cured
with a curative agent selected from the group comprising curative
polyamines, curative polyols, curative alcoholamines and mixtures
thereof. The polishing pad contains at least 0.1 volume percent filler or
porosity.