A vacuum micropump for use in a sealed package includes at least one
pumping cell and a magnetic field proximate to the pumping cell. The
pumping cell has at least one anode, at least one dielectric in contact
with the at least one anode, at least one titanium cathode in contact
with the dielectric and an electric field between the at least one anode
and the at least one cathode. The dielectric defines a space between the
at least one anode and the at least one cathode. The vacuum micropump may
be used to gauge pressure within the sealed package. An appropriate
method of use is also provided.