The conventional detection technique has the following problems in
detecting interference fringes: (1) Setting and adjustment are complex
and difficult to conduct; (2) A phase image and an amplitude image cannot
be displayed simultaneously; and (3) Detection efficiency of electron
beams is low. The invention provides a scanning interference electron
microscope which is improved in detection efficiency of electron beam
interference fringes, and enables the user to observe electric and
magnetic information easily in a micro domain of a specimen as a scan
image of a high S/N ratio under optimum conditions.