In a semiconductor-fabrication equipment of a minienvironment system,
ambient air is prevented from entering a gap between an opening of the
semiconductor-fabrication equipment and a wafer gateway of a hermetic
container to prevent dust entrained in the ambient air from adhering to
wafers in the hermetic container. Clean air is injected from a clean-air
injection device (1), which is connected to an air-supply device (2)
through an air-supply tube (3), and which is provided with filter means
(6a) in the from of rectangular frame formed with cylindrically-shaped
filters connected to each other, to form an air curtain at the gap (96)
between the gateway (74) of the hermetic container (71) through which
wafers (73) are taken out of or put in the hermetic container (71) and
the opening (98) of a loading part (78) attached to a front panel (77) of
the semiconductor-fabrication equipment (76), thereby shutting off the
ambient air that would otherwise enter the hermetic container (71)
through the gap (96) between the gateway (74) of the hermetic container
(71) and the opening (98) of the loading part (78) attached to the
semiconductor-fabrication equipment (76) when a lid (75) of the hermetic
container (71) is opened into the semiconductor-fabrication equipment
(76).