An electrostatic chuck comprises a dielectric ceramic layer made of an
alumina sintered body having a volume resistivity equal to or greater
than about 1.times.10.sup.17.OMEGA.cm at room temperature and a volume
resistivity equal to or greater than about 1.times.10.sup.14.OMEGA.cm at
300.degree. C., and an electrode formed on one surface of the dielectric
ceramic layer.