A lighting optical machine and defect inspection system having high
reliability and safety when a laser beam is used as a light source. The
lighting optical machine comprises: a housing, which accommodates a laser
source, a beam deflection mechanism having first and second plane mirrors
enabling a beam emitted from the laser source to be reflected so that the
beam travels in the direction almost parallel to the beam emitted from
the laser source, a beam expander for converting the beam to a parallel
beam having a larger cross-sectional area, an objective lens, through
which the parallel beam is reduced and applied to the surface of a
sample; a first control mechanism for controlling the directions of the
two plane mirrors of the beam deflection mechanism with an electric
signal; and a second control mechanism for controlling the focus position
of the beam expander with an electric signal.